WarningYour internet explorer is in compatibility mode and may not be displaying the website correctly.
You can fix this by pressing 'F12' on your keyboard, Selecting 'Document Mode' and choosing 'standards' (or the latest version
listed if standards is not an option).
The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes.