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The Application Gallery features COMSOL Multiphysics tutorial and demo app files pertinent to the electrical, mechanical, fluid, and chemical disciplines. You can download ready-to-use tutorial models and demo apps with step-by-step instructions for how to create them yourself. The examples in the gallery serve as a great starting point for your own simulation work.

Use the Quick Search to find tutorials and apps relevant to your area of expertise. Log in or create a COMSOL Access account that is associated with a valid COMSOL license to download the MPH-files.

Ion Energy Distribution Function

One of the most useful quantites of interest after solving a self-consistent plasma model is the ion energy distribution function (IEDF). The magnitude and shape of the IEDF depends on many of the discharge parameters; pressure, plasma potential, sheath width etc. At very low pressures the plasma sheath is said to be collisionless, meaning that the ion energy is not retarded by collisions with ...

Electrodeless Lamp

This model simulates an electrodeless lamp with argon/mercury chemistry. The low excitation threshold for mercury atoms means that even though the mercury is present in small concentrations, its behavior dominates. There is strong UV emission from the plasma at 185 nm and 253 nm. The UV emission can stimulate phosphors coated on the surface of the bulb. From an electrical point of view, the lamp ...

Benchmark Model of a Capacitively Coupled Plasma

The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes.

Dipolar Microwave Plasma Source

This model presents a 2D axisymmetric dipolar microwave plasma source sustained through resonant heating of the electrons. This is known as electron cyclotron resonance (ECR), which occurs when a suitable high magnetic flux density is present along with the microwaves. This is an advanced model that showcases many of the features that make COMSOL unique, including: Infinite elements for the ...

GEC CCP Reactor, Argon Chemistry, 1D

The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. Even the simplest plasma models are quite involved so a 1D example helps in understanding the physics without excessive CPU time. The problem has no steady-state solution, although a periodic steady-state solution is reached after a suitable number of RF cycles (usually >1000).

Harmonic Content of the Power Deposition into a Dual Frequency Capacitively Coupled Plasma

Energy transfer from the time varying electrostatic field to electrons in a capacitively coupled plasmas (CCP) does not exclusively occur at twice the RF frequency. Due to the highly nonlinear mechanism of power transfer from the fields to the electrons, power deposition occurs at frequencies higher than twice the driving frequency. For dual frequency CCP reactors the harmonic content of the ...

Oxygen Boltzmann Analysis

The Boltzmann equation can be solved to validate sets of electron impact collision cross sections. In fact, sets of collision cross sections are traditionally inferred by solving a two-term approximation to the Boltzmann equation and comparing the results to swarm experiments. This model solves a two-term approximation to the Boltzmann equation and compares the computed drift velocity and ...

Capacitively Coupled Plasma

This application provides insight into the instantaneous and periodic steady state solutions of a 1D capacitively coupled plasma. The geometry, pressure and applied voltage are all inputs, as is the frequency and number of RF cycles over which to solve. Aside from instantaneous and time averaged plots, global quantities for the power deposition and current are computed.

Argon Boltzmann Analysis

The electron energy distribution function (EEDF) plays an important role in the overall behavior of discharges. Analytic forms of the EEDF exist such as Maxwellian or Druyvesteyn, but in some cases they fail to fit the discharge physics. This tutorial model investigates the effects of various parameters on the electron energy distribution function and rate coefficients for an argon discharge.

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