The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.

Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. To download the MPH-files, log in or create a COMSOL Access account that is associated with a valid COMSOL license. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.


Benchmark Model of a Capacitively Coupled Plasma

The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many different codes.

Boltzmann DC Glow Discharge

This application models a DC glow discharge. The electron energy distribution function (EEDF) and electron transport properties are computed with the *Boltzmann Equation, Two-Term Approximation* interface. Since input parameters for the *Boltzmann Equation, Two-Term Approximation* interface, like the ionization degree of the plasma, are not known *a priori*, an iterative process is performed. A ...

Capacitively Coupled Plasma

The NIST Gaseous Electronics Conference has provided a platform for studying Capacitively Coupled Plasma (CCP) reactors, which is what this application is based upon. The operating principle of a capacitively coupled plasma is different when compared to the inductive case. In a CCP reactor, the plasma is sustained by applying a sinusoidal electrostatic potential across a small gap filled with a ...

Dipolar Microwave Plasma Source

This model presents a 2D axisymmetric dipolar microwave plasma source sustained through resonant heating of the electrons. This is known as electron cyclotron resonance (ECR), which occurs when a suitable high magnetic flux density is present along with the microwaves. This is an advanced model that showcases many of the features that make COMSOL unique, including: Infinite elements for the ...

Surface Chemistry Tutorial Using the Plasma Module

Surface chemistry is often an overlooked aspect of reacting flow modeling. This tutorial model shows how surface reactions and species can be added to study processes like chemical vapor deposition (CVD). The tutorial then models silicon growth on a wafer. Initially, the example uses a global model to investigate a broad region of parameters with complex chemistry. Then, a space-dependent model ...

Applying a Current-Voltage Switch to Models

This example exemplifies how to model the switching between current and voltage excitations in *Terminal* boundary conditions. A more detailed description of the phenomenon and the modeling process can be seen in the blog post "[Control Current and Voltage Sources with the AC/DC Module](https://www.comsol.com/blogs/control-current-and-voltage-sources-with-the-acdc-module/)".

GEC CCP Reactor

This model investigates the National Institute of Standards and Technology (NIST) Gaseous Electronics Conference (GEC) reference cell in two dimensions using the _Plasma, Time Periodic_ interface. A 2D example helps in understanding the physics without excessive CPU time. The cell is driven with a fixed power and the results show good agreement with those published in the literature.

Ion Energy Distribution Function

One of the most useful quantites of interest after solving a self-consistent plasma model is the ion energy distribution function (IEDF). The magnitude and shape of the IEDF depends on many of the discharge parameters; pressure, plasma potential, sheath width etc. At very low pressures the plasma sheath is said to be collisionless, meaning that the ion energy is not retarded by collisions with ...

Neagative Streamer in Nitrogen

Streamers are transient filamentary electric discharges that can develop in a nonconducting background in the presence of an intense electric field. These discharges can attain high electron number density and consequently a high concentration of chemical active species that are relevant for numerous applications. Industrial applications include ozone production, pollution control, and surface ...

Microwave Microplasma

Plasmas sustained in microscale discharge gaps are able to operate at high pressure (1 atm) with high electron number density (1020 m-3) and power density (109 W.m-3) while maintaining a relatively cool heavy-particle temperature. This model simulates an atmospheric pressure argon plasma sustained by a time-varying electric excitation in the microwave range. The model is one-dimensional in the ...