Fluid-Structure Interaction Modeling for an Optimized Design of a Piezoelectric Energy Harvesting MEMS GeneratorI. Kuehne, A. van der Linden, J. Seidel, M. Schreiter, L. Fromme, and A. Frey
Siemens AG, Corporate Research & Technologies, Munich, Germany
Comsol Multiphysics GmbH, Göttingen, Germany
This paper reports the design of a piezoelectric energy harvesting micro generator for an energy autonomous tire pressure monitoring wireless sensor node. For our design we use a piezoelectric MEMS generator approach without additional mass. The intrinsic mass of the cantilever is in the microgram region and the resulting acceleration forces are very small.
The generator has a triangular shape to enable a uniform stress distribution in the horizontal surface direction. The cantilever consists of a carrier layer realized in silicon and a piezo layer. The carrier layer serves three purposes: it provides mechanical stability of the structure, it contains the neutral axis and it is used as a storage element for the harvested mechanical energy.